NX420 Six-axis robotic arm (manipulator)
Wafer handling robot · Load — · Reach: 736mm
NX420 specifications
・Single arm, both hands ・Z-axis travel range: 0~330mm ・End effector type: Vacuum adsorption/edge clamping ・Compatible wafer size: 8 inches ・Compatible FOUP count: up to 2FOUP
Model introduction
・Single arm, dual hands ・Z-axis travel range: 0~330mm ・End effector type: Vacuum suction/edge clamping ・Compatible wafer size: 8 inches ・Compatible FOUP count: up to 2 FOUP Typical applications include: wafer handling.
Wafer handling robots NTJ/TTJ/NTH/NX Series · Series technical features
Kawasaki's wafer handling robots comply with SEMI-F47 and SEMI-S2 standards, handling up to 4FOUP standard EFEM without the need for running gear, handling wafers in the upstream processes of semiconductor manufacturing equipment.
Compliant with SEMI-F47 and SEMI-S2 standards, it adapts to the voltage fluctuations and safety requirements of semiconductor factories.
Through Kawasaki's developed drive structure, it achieves the high-precision, smooth, and smooth operation required for wafer handling.
Supports EFEM with up to 4 FOUP specifications without a running gear, saving equipment space.
The NX series features a compact arm design, further saving installation space for semiconductor equipment.
Typical application scenarios
Common application processes for this model (click to view process details):
Wafer handling robots NTJ/TTJ/NTH/NX Series · Other models in the same series
Compare load and reach to choose the model that best suits your process.
NX420 model positioning and working condition adaptation
NX420 This is an industrial robot model belonging to the Kawasaki wafer handling robot NTJ/TTJ/NTH/NX series, with load parameters based on the official manual and a movement radius of 736mm. Kawasaki's technical foundation is strong AS language capabilities and deep accumulation in semiconductor cleanliness and welding applications; The control platform is F series (partial) / E series, and the program ecosystem is AS language + teach pendant.
From the perspective of operating condition adaptation, typical applications for positioning this load level are:Handling, assembly, and general automationCommon application processes for this model include wafer handling. The short-arm (736mm) model has a compact structure, suitable for dense workstations and close-range pick-and-place operations, with a small working unit footprint. Specific load parameters are subject to the nameplate and official manual.
| Parameters | Engineering interpretation and usage recommendations |
|---|---|
| Radius of motion: 736mm | Determine the radius of the workcell layout: bins, tooling, and fences are bounded by maximum arm span + safety distance; Verify the accessibility of each pick-and-place point during cross-station service |
| Controllers F Series (partial) / E Series | Decide on the process ecosystem, spare parts channels, and second-hand residual value; Currently, spare parts channels are smooth, and repair and upgrade paths are mature |
Control systems and common failure modes
The NX420 comes with F-series (partial)/E-series controllers, with AS language and development environment as AS + teach pendant. Maintenance of this generation of control platforms focuses on three basic components: power, storage, and cooling—most "sudden downtime" can be detected in advance when preventive maintenance is in place.
| Failure mode | Typical performance | Disposal recommendations |
|---|---|---|
| 1FB/2FB board failure | 1FB/2FB board fault (driver control board aging) | Included as a mandatory inspection item for annual maintenance, with spare parts stocked in advance |
| The encoder battery is depleted, causing the origin to be lost | The encoder battery is depleted, causing the origin to be lost | Initial interpretation of alarm codes by reference with manuals, remote diagnosis allows for early positioning |
| The teach pendant's LCD and buttons are aging | The teach pendant's LCD and buttons are aging | Daily inspection coverage, with abnormal trends (abnormal noises/temperature rise/errors) recorded |
| Overcurrent alarm in the driver unit | Overcurrent alarm in the drive unit (motor or load abnormality) | Quarterly dust removal maintenance and cabinet temperature monitoring |
| Maintenance projects | Cycle recommendations | Key points |
|---|---|---|
| The battery is replaced annually | Every year | The battery should be replaced annually, and the original calibration should be performed after replacement |
| Reducer grease should be refilled periodically | By cycle | Reducer grease should be refilled periodically |
| Spare parts for boards and cards are recommended for key customers with in-house redundancy | According to the manufacturer's manual cycle | Spare parts for boards and cards are recommended for key customers with in-house redundancy |
| Cable and drag chain inspection | every six months | Insulation, shielding, and bending radius inspection of power and encoder lines, as well as wear of cables inside the drag chain, are the main causes of intermittent faults |
| Zero point and accuracy retest | Every year | Repeatability measured by dial gauges or laser trackers, drift trend digitization—accuracy degradation can be seen six months in advance |
| Control cabinet dust removal and fans | Every quarter | Filter cleaning, fan speed and noise checks, cabinet temperature recording; Dust environments shorten the cycle |
Henghuan's service capabilities for the NX420
This site is a third-party robotics technology service provider. The NX420 supports eight major business services (listed by service frequency of each model):
- Maintenance and repair: For NX420 on-site diagnostics, board-level repairs, and annual maintenance contracts—battery replacement every year, we will follow SOPs and respond to Sichuan-Chongqing on the same day.
- Used & in-stock robot sales: Medium second-hand circulation, E/F series materials and board-level repair channels we have accumulated; In-stock NX420 or equivalent models come with a comprehensive functional test report and a 12-month warranty.
- Sales of new industrial robots: When adding new production lines or replacing entire batches, we conduct cross-brand selection comparisons based on process requirements (including models of the same class as Kawasaki), and provide configuration and pricing plans.
- Applied technology services: NX420 process programming, trajectory optimization, tap time potential, and reconfiguration formula management, with targeted tuning according to wafer handling conditions.
- Research and development of automation equipment: Custom fixture ends, peripheral tooling, and safety fences for NX420, with interfaces designed according to Kawasaki flange and IO standards.
- Robot rental: For short-term production capacity or process validation periods, NX420 models of the same class in inventory can be rented, including transportation, installation, and commissioning, with flexible rental periods and flexible purchase options.
Common issues with this device
Is it easy to find NX420 spare parts?
Kawasaki: The spare parts channel for this generation is smooth; we have in-stock or short-cycle channels for standard parts such as drivers, power modules, batteries, and teach pendant components; It is recommended to replace consumables for batteries annually according to the annual maintenance contract.
With a nominal load of X kg, how much weight can it actually handle?
The rated load is the static load limit of the flange surface. In actual selection, three factors must be considered: the self-weight of the end fixture (vacuum suction cup groups or grippers often account for 2–5kg), the inertia generated by the workpiece offload (checked according to the inertia ratio when the center of gravity deviates from the flange center), and the dynamic load during high-speed movement. The conventional engineering practice is to keep the "end + workpiece" within 70%–80% of the rated value to ensure cycle time and service life.
If the equipment's accuracy deteriorates after several years of use, how can it be restored?
According to the inspection order: first check whether the zero point is drifting (common after collision or battery depletion), then perform zero calibration; Check the reducer's return error (actual measurement of forward and reverse positioning deviation; if exceeded, disassemble or replace); Then check the installation base fastening and foundation settlement; Finally, trajectory compensation parameter restructuring. Most accuracy issues can be mostly restored after calibration and maintenance, so there is no need to rush into major repairs—we first release the inspection data before deciding on the plan.
Is a used NX420 worth buying?
Second-hand circulation is moderate, and we have accumulated experience in E/F series materials and board-level repair channels. Three essential items for second-hand procurement: comprehensive inspection reports (axial accuracy, driver status, insulation and battery), maintenance history and operating hours, controller generation, and software license integrity. Every used machine we sell comes with inspection records and a 12-month warranty, and we can also accept third-party inspections designated by customers.
Need technical support or procurement for this model?
Whether it's model selection comparison, installation and commissioning, or maintenance of in-use equipment, you can contact Henghuan. Tell us about your processes, loads, and equipment status, and we will provide third-party technical support and solution recommendations.
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